Wafer probes
US4853627A · kind A · utility
106Cited by
4References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 11, 1988 |
| Grant date | Aug 1, 1989 |
| Priority date | — |
| Expiry date | Jul 11, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06772
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A wafer probe comprises a support member having an end region which is shaped to permit the end region to be brought into close proximity with a component under test. An amplifier is mounted on the support member at its end region. A conductive probe element is attached to the amplifier and is electrically connected to the amplifier's input terminal. A transmission line is connected to the amplifier's output terminal for transmitting signals from the amplifier to a measurement instrument.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.