Transfer vessel device and method of transfer using the device
US4856297A · kind A · utility
5Cited by
5References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 29, 1987 |
| Grant date | Aug 15, 1989 |
| Priority date | — |
| Expiry date | Dec 29, 2007 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF17C2227/0379
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A transfer vessel device for transporting a specimen between two vacuum apparatuses while maintaining the specimen under a high vacuum. The device comprises a hermetic container for accommodating a specimen removed from a vacuum apparatus and for supporting the specimen; a heat-insulated container in which a cooling medium such as liquid nitrogen is accommodated; and a heat-transfer member which is formed of a highly heat conductive material such as copper and which surrounds the specimen in the hermetic container and has one end leading into the heat-insulated container so as to be cooled by the cooling medium.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.