Suspension assembly for a scanning mirror
US4861125A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 6, 1988 |
| Grant date | Aug 29, 1989 |
| Priority date | — |
| Expiry date | May 6, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/10
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical scanning device for flaw detection or the like having a suspension system including at least two pairs of flexure legs. A first pair has flexure legs diagonally crossed in spaced-apart relation and fixed at one end to a stationary body and at an opposite end to a vibratory body. A second pair of spaced-apart cross-flexure legs link the stationary base to a magnetic driver for varying the angular position of the vibratory body about an axis of rotation. Each of the four flexure legs has a radial stiffness exceeding a torsional stiffness. The first pair of cross-flexure legs and the supported mass have characteristics corresponding to the characteristics of the second pair of cross-flexure legs and associated mass, thereby providing identical resonant frequencies of distortional bending. Any torque exerted on the stationary base by the first pair of cross-flexure legs is compensated by a torque which is equal in magnitude but opposite in direction translated through the second pair of flexure legs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.