Vacuum load lock
US4861563A · kind A · utility
23Cited by
11References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 14, 1987 |
| Grant date | Aug 29, 1989 |
| Priority date | — |
| Expiry date | May 14, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S422/907
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A compact load lock and processing chamber is disclosed in which a moveable member forms a closure for both a load lock volume and an article processing volume. The moveable member is connected to fixed members by a flexible diaphragm which provides a non-sliding seal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.