Spectrum CVD, Inc.
10Patents
0Active
10Granted
33Portfolio score
Filing activity: Aug 5, 1985 → May 4, 1990
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4632057A | CVD plasma reactor | Chemistry; Metallurgy | 50 | Expired |
| US4640224A | CVD heat source | Chemistry; Metallurgy | 44 | Expired |
| US4607591A | CVD heater control circuit | Chemistry; Metallurgy | 24 | Expired |
| US4692343A | Plasma enhanced CVD | Chemistry; Metallurgy | 23 | Expired |
| US4966869A | Tungsten disilicide CVD | Emerging Cross-Sectional Technologies | 23 | Expired |
| US4861563A | Vacuum load lock | Emerging Cross-Sectional Technologies | 23 | Expired |
| US4737474A | Silicide to silicon bonding process | Emerging Cross-Sectional Technologies | 23 | Expired |
| US4777061A | Blanket tungsten deposition for dielectric | Chemistry; Metallurgy | 22 | Expired |
| US4749597A | Process for CVD of tungsten | Electricity | 9 | Expired |
| US4788416A | Direct wafer temperature control | Physics | 6 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.