Cylinder cabinet piping system
US4869301A · kind A · utility
41Cited by
9References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 17, 1988 |
| Grant date | Sep 26, 1989 |
| Priority date | — |
| Expiry date | May 17, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/4259
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The cylinder cabinet piping system of this invention has a system to supply a purge gas continuously to the main line, or to the main line and the branch line, thereby to prevent stagnation of gas in the purge gas line and to supply a super-high-purity gas to a process unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.