Kazuhiko Sugiyama
33Patents
14h-index
58Co-inventors
84Inventor score
Filing activity: May 17, 1988 → Jun 26, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5314603A | Plasma processing apparatus capable of detecting and regulating actual RF power at electrode within chamber | Electricity | 91 | Expired |
| US6152168A | Pressure-type flow rate control apparatus | Emerging Cross-Sectional Technologies | 71 | Expired |
| US5147493A | Plasma generating apparatus | Electricity | 66 | Expired |
| US6178995A | Fluid supply apparatus | Emerging Cross-Sectional Technologies | 45 | Expired |
| US6422264B1 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Emerging Cross-Sectional Technologies | 41 | Expired |
| US4869301A | Cylinder cabinet piping system | Emerging Cross-Sectional Technologies | 41 | Expired |
| US6967954B2 | ATM edge node switching equipment utilized IP-VPN function | Electricity | 30 | Expired |
| US5226968A | Apparatus and method for oxidation treatment of metal | Chemistry; Metallurgy | 28 | Expired |
| US6820632B2 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Emerging Cross-Sectional Technologies | 24 | Expired |
| US6158679A | Orifice for pressure type flow rate control unit and process for manufacturing orifice | Physics | 22 | Expired |
| US7059363B2 | Method of supplying divided gas to a chamber from a gas supply apparatus equipped with a flow-rate control system | Emerging Cross-Sectional Technologies | 17 | Expired |
| US6964279B2 | Pressure-type flow rate control apparatus | Emerging Cross-Sectional Technologies | 17 | Expired |
| US7085628B2 | Apparatus for the correction of temperature drift for pressure sensor, pressure control apparatus and pressure-type flow rate control apparatus | Physics | 16 | Expired |
| US6841485B1 | Method of manufacturing semiconductor device and manufacturing line thereof | Electricity | 15 | Expired |
| US7297084B2 | Transmission apparatus | Mechanical Engineering; Lighting; Heating | 13 | Expired |
| US7497482B2 | Pipe joint | Mechanical Engineering; Lighting; Heating | 12 | Expired |
| US8496022B2 | Device and method for supplying gas while dividing to chamber from gas supplying facility equipped with flow controller | Emerging Cross-Sectional Technologies | 12 | Active |
| US5224998A | Apparatus for oxidation treatment of metal | Chemistry; Metallurgy | 12 | Expired |
| US5241987A | Process gas supplying apparatus | Emerging Cross-Sectional Technologies | 12 | Expired |
| US6848470B2 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Emerging Cross-Sectional Technologies | 9 | Expired |
| US7367241B2 | Differential pressure type flowmeter and differential pressure type flow controller | Physics | 8 | Expired |
| US7669455B2 | Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device | Physics | 7 | Expired |
| US7211018B2 | Differential planetary gear device, and differential planetary gear device starting device and starting method | Mechanical Engineering; Lighting; Heating | 6 | Expired |
| US7654927B2 | Transmission apparatus | Mechanical Engineering; Lighting; Heating | 6 | Active |
| US9098082B2 | Device and method for supplying gas while dividing to chamber from gas supplying facility equipped with flow controller | Emerging Cross-Sectional Technologies | 5 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.