Automatic handling apparatus for plate-shaped objects
US4871290A · kind A · utility
24Cited by
16References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 16, 1988 |
| Grant date | Oct 3, 1989 |
| Priority date | — |
| Expiry date | May 16, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An automatic handling apparatus for plate-shaped objects, including a height-adjustable magazine having compartments lying horizontally, one above the other, and a manipulator which can be moved in a linear manner and is swivelable. The manipulator is equipped with interchangeable gripping arms. The gripping arms and the plate-shaped objects are deposited in compartments of the magazine. The compartments include a coding for the size and shape of the plate-shaped objected and the associated gripping arms. A control device controls the manipulator as a function of the coding of the plate-shaped object or gripping arm to be handled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.