Ulrich Kaczynski
15Patents
6h-index
6Co-inventors
55Inventor score
Filing activity: May 16, 1988 → Mar 30, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6438856B1 | Apparatus for fine positioning of a component, and coordinate measuring machine having an apparatus for fine positioning of a component | Physics | 54 | Expired |
| US4871290A | Automatic handling apparatus for plate-shaped objects | Electricity | 24 | Expired |
| US6347458B1 | Displaceable X/Y coordinate measurement table | Emerging Cross-Sectional Technologies | 22 | Expired |
| US6323953A | Method and device for measuring structures on a transparent substrate | Physics | 20 | Expired |
| US6377870B1 | Device and method for delivering various transparent substrates into a high-precision measuring instrument | Electricity | 17 | Expired |
| US6960755B2 | Contact sensor, and apparatus for protecting a protruding component | Electricity | 9 | Expired |
| US5315080A | Limit switching apparatus with defined overtravel for specimen protection on microscopes with motorized focusing drive | Physics | 6 | Expired |
| US6236503A | Microscope stand for a wafer inspection microscope | Physics | 6 | Expired |
| US6919658B2 | Coordinate measuring stage | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6778260B2 | Coordinate measuring stage and coordinate measuring instrument | Physics | 4 | Expired |
| US6816253B1 | Substrate holder, and use of the substrate holder in a highly accurate measuring instrument | Electricity | 3 | Expired |
| US6816263B2 | Interferometric measurement apparatus for wavelength calibration | Physics | 2 | Expired |
| US6441899B1 | Apparatus and method for loading substrates of various sizes into substrate holders | Electricity | 1 | Expired |
| US7081963B2 | Substrate holder, and use of the substrate holder in a highly accurate measuring instrument | Electricity | 1 | Expired |
| US6441911B1 | Measuring instrument and method for measuring patterns on substrates of various thicknesses | Physics | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.