Process for equipment to coat tools for machining and forming techniques with mechanically resistant layers

US4871434A · kind A · utility

Assignee

• Leybold-Heraeus GmbH · DE

Inventors

• Wolf-Dieter Munz · Somborn, DE
• Bernd Hensel · Eschborn, DE
• Michael Scherer · Crimmitschau, DE
• Otto Knotek · Aachen, DE

Key dates

• Filing date: Aug 15, 1986
• Grant date: Oct 3, 1989
• Expiry date: Aug 15, 2006

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J37/3405
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Process and apparatus for coating a tool with a layer of a compound which contains at least one of carbon and nitrogen and at least one of titanium, zirconium, chromium, tungsten, tantalum, vanadium, niobium, hafnium and molybdenum. The apparatus includes a vacuum chamber and a substrate holder for accommodating at least one tool with the substrate holder at a bias of between -40 and -200 V relative to ground. The apparatus includes at least two magnetron sputtering cathodes disposed in mirror symmetry to the substrate holder. The target contains at least one metal selected from the group consisting of T, Zr, Cr, W, Ta, V, Nb, Hf and Mo. The apparatus includes at least one gas source for supplying the vacuum chamber with a noble gas and a reaction gas. The reaction gas contains at least one of nitrogen and a gaseous carbon compound. The apparatus includes at least one anode in the edge region of each target so that the anodes are positioned in mirror symmetry with respect to the target holder. Each of the anodes is connected to a voltage means for applying a voltage of +10 to +200 V relative to ground.