Polysilane compound and photosensitive composition
US4871646A · kind A · utility
22Cited by
8References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 13, 1988 |
| Grant date | Oct 3, 1989 |
| Priority date | — |
| Expiry date | May 13, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0754
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
Disclosed are a polysilane containing a unit represented by the following formulas I, II, or III, and a photosensitive composition consisting of the polysilane. ##STR1##
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.