Driving mechanism having a pressure member
US4872358A · kind A · utility
4Cited by
5References
30Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 29, 1988 |
| Grant date | Oct 10, 1989 |
| Priority date | — |
| Expiry date | Feb 29, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/1896
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A driving mechanism having a driving shaft, which is rotatable about a first axis and on which a pressure member is located. The pressure member has a first roller segment which engages a fixed support and a second roller segment which engages an adjustment member. The adjustment member can be coupled to a load displaceable parallel to a second axis. The driving mechanism is particularly suitable for comparatively small and accurate displacements of a load, such as, for example, a mask table in an opto-lithographic apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.