Inventor · Belfeld, NL

Edwin Johan Buis

30Patents
6h-index
68Co-inventors
72Inventor score

Filing activity: Feb 29, 1988 → Oct 9, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US5587779A Apparatus for transferring toner images Physics 41 Expired
US6498350B2 Crash prevention in positioning apparatus for use in lithographic projection apparatus Physics 12 Expired
US6831285B2 Lithographic apparatus, magnetic support for use therein, device manufacturing method, and device manufactured thereby Physics 8 Expired
US6657204B2 Cooling of voice coil motors in lithographic projection apparatus Electricity 8 Expired
US7486384B2 Lithographic support structure Electricity 7 Expired
US5483269A Process for the preparation of an image forming element and related printing device Physics 6 Expired
US7057313B2 Cooling of voice coil motors Electricity 5 Expired
US5757404A Inkjet array and method of production Emerging Cross-Sectional Technologies 4 Expired
US4872358A Driving mechanism having a pressure member Emerging Cross-Sectional Technologies 4 Expired
US7307689B2 Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearing Physics 4 Expired
US6937316B2 Lithographic apparatus, device manufacturing method and device manufactured thereby Physics 2 Expired
US9136151B2 Actuator Electricity 2 Active
US7088428B2 Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method Electricity 1 Expired
US9785051B2 Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices Electricity 1 Active
US7700930B2 Lithographic apparatus with rotation filter device Chemistry; Metallurgy 1 Active
US7602472B2 Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device Physics 1 Active
US8724081B2 Lithographic apparatus and method Physics 1 Active
US8817232B2 Optical apparatus, and method of orienting a reflective element Physics 1 Active
US7492440B2 Lithographic apparatus and device manufacturing method Physics 1 Expired
US7518705B2 Lithographic apparatus and device manufacturing method Physics 1 Active
US7224429B2 Lithographic apparatus, device manufacturing method and positioning system Electricity 1 Expired
US8867021B2 Illumination system, lithographic apparatus and method of adjusting an illumination mode Physics 0 Active
US12139436B2 Droplet generator nozzle Chemistry; Metallurgy 0 Active
US8279408B2 Object support positioning device and lithographic apparatus Physics 0 Active
US9172294B2 Planar motor and lithographic apparatus comprising such planar motor Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.