Process for the preparation of an o-naphthoquinonediazide sulfonic acid ester and photosensitive mixture containing same

US4873169A · kind A · utility

Assignee

• Hoechst GmbH · DE

Inventors

• Fritz Erdmann · Eltville am Rhein, DE
• Horst-Dieter Thamm · Kelkheim, DE
• Hans J. Staudt · Haiming, DE

Key dates

• Filing date: Aug 20, 1987
• Grant date: Oct 10, 1989
• Expiry date: Aug 20, 2007

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/022
• WIPO field: Organic fine chemistry
• WIPO sector: Chemistry

Abstract

A process for the preparation of an o-naphthoquinonediazide sulfonic acid ester is disclosed. Esterification of an o-naphthoquinonediazide sulfonic acid halide with a mono- or polyvalent phenolic compound in a solvent is performed in the presence of ammonia, of ammonium salts of weak acids or of aliphatic derivatives of ammonia having 1 to 3 carbon atoms, at a pH within the range from about 1.5 to about 8.5 and a temperature within the range from about 15.degree. C. to about 40.degree. C. The esters of o-naphthoquinonediazide sulfonic acid which are obtained by this process contain only small amounts of metal ions and can be used in photosensitive mixtures satisfying high requirements of the microelectronics industry.