Plasma enhanced chemical vapor deposition wafer holding fixture
US4873942A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 8, 1988 |
| Grant date | Oct 17, 1989 |
| Priority date | — |
| Expiry date | Jun 8, 2008 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/509
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A holding fixture for plasma enhanced chemical vapor deposition processing of semiconductor wafers comprising a frame boat assembly for holding disk-shape semiconductor wafer workpieces to be subjected to a flow of reactant gases serially across the workpieces in a direction perpendicular to the broad faces of the workpieces. The boat holding fixture comprises a pair of upright, spaced-apart insulating frame end members having a first set of spaced-apart parallel, elongated insulating rods secured between the end members for holding the boat in assembled relation. An electrode supporting rack is secured within the boat for holding a plurality of flat, spaced-apart, electrically conductive electrodes in an upright position with the flat surfaces parallel to each other and perpendicular to the longitudinal axis of the boat. A workpiece holding rack comprised by at least two spaced-apart, parallel, insulating, workpiece support, elongated rods is provided with each workpiece support rod being seated in longitudinally aligned apertures formed on lower opposite sides of the periphery of the array of flat, spaced-apart parallel electrically conductive electrodes for holding the workpiece…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.