Supporting apparatus for semiconductor crystal rod
US4886647A · kind A · utility
2Cited by
6References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 16, 1987 |
| Grant date | Dec 12, 1989 |
| Priority date | — |
| Expiry date | Dec 16, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1084
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A supporting apparatus for a semiconductor noncrystal rod comprises a movable ring adapted to move freely in horizontal directions unless it is engaged with the monocrystal rod, a lock means to prevent the movable ring from horizontally moving, and a drive means to elevate the movable ring.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.