Fine positioning device
US4888878A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 14, 1988 |
| Grant date | Dec 26, 1989 |
| Priority date | — |
| Expiry date | Sep 14, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/41352
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A fine positioning device is formed of a central rigid portion, a first set of outwardly-extending portions extending symmetrically along a first axis from the central rigid portion, a second set of outwardly-extending portions extending symmetrically from the central rigid portion along a second axis which is perpendicular to the first axis, a first set of parallel flexible-beam displacement mechanisms provided symmetrically to each other with the first set of outwardly-extending portions respectively to produce translational displacements along the second axis, and a second set of parallel flexible-beam displacement mechanisms provided symmetrically to each other with the second set of outwardly-extending portions respectively to produce translational displacements along the first axis. Three set of radial flexible-beam displacement mechanisms are provided to produce angular displacements about three axes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.