Apparatus for the quasi-continuous treatment of substrates
US4892451A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jan 11, 1988 |
| Grant date | Jan 9, 1990 |
| Priority date | — |
| Expiry date | Jan 11, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In an apparatus for the treatment of substrates supplied in cassettes, with a series of lock chambers and treatment chambers, with a transport system for transporting at least one substrate holder through the chambers, and with a loading station, the problem of loading the apparatus with substrates from a moving belt without the need to hold the substrates in form-fitting mountings is solved as follows: (a) the substrate holders are constructed so as to hold one substrate at a time at an acute angle to a vertical plane, and (b) the loading station has a means for shifting at least one cassette and a manipulator system whereby the movements of extracting the substrate from the cassette and inserting it into the cassette can be performed in the perpendicular direction and whereby the substrate can be brought by a rotation of 90 degrees into a slanting position which corresponds substantially to the position of the receiving plane of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.