Inventor · Obertshausen, DE

Peter Mahler

16Patents
10h-index
10Co-inventors
69Inventor score

Filing activity: Jul 10, 1975 → Feb 11, 2000

Most-cited inventions

PatentTitleAreaCited byStatus
US5558751A Dual cathode sputter coating apparatus Electricity 35 Expired
US5376180A Apparatus for holding disk-shaped substrates in the vacuum chamber of a coating or etching apparatus Chemistry; Metallurgy 21 Expired
US4892451A Apparatus for the quasi-continuous treatment of substrates Emerging Cross-Sectional Technologies 20 Expired
US5658114A Modular vacuum system for the treatment of disk-shaped workpieces Emerging Cross-Sectional Technologies 18 Expired
US5350455A Device for holding disk-shaped substrates in the vacuum chamber of a coating or etching apparatus Chemistry; Metallurgy 16 Expired
US5133285A Apparatus for transporting substrates Electricity 16 Expired
US4338883A Vacuum vapor-deposition installation with a vacuum chamber, a vaporizing chamber and an evaporizing chamber Emerging Cross-Sectional Technologies 15 Expired
US4589369A Device for holding a substrate Chemistry; Metallurgy 15 Expired
US4595483A Cathode sputtering apparatus with adjacently arranged stations Electricity 11 Expired
US5097794A Apparatus for transporting substrates in a vacuum coating system Electricity 10 Expired
US4020352A System for irradiating flowable material Chemistry; Metallurgy 5 Expired
US5442841A Hoisery trimming apparatus Emerging Cross-Sectional Technologies 4 Expired
US5429705A Apparatus for coating and/or etching substrates in a vacuum chamber Electricity 2 Expired
US6391112B1 Heat-exchanging workholder for a vacuum unit Electricity 2 Expired
US5922182A Apparatus for coating substrates especially with magnetizable materials Electricity 2 Expired
US5468362A Apparatus for treating substrates in a vacuum chamber Chemistry; Metallurgy 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.