Processes involving lithographic materials
US4892617A · kind A · utility
2Cited by
11References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 19, 1987 |
| Grant date | Jan 9, 1990 |
| Priority date | — |
| Expiry date | Oct 19, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/98
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Extremely useful compositions for delineation of materials utilized in device applications have been found. These compositions include a polymer having segments that are at least 10 monomer units long of a first entity and segments again at least 10 monomer units long of a second entity. The monomer units are chosen so that each segment type provides a specific chemical characteristic to the polymer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.