Inventor · Bound Brook, NJ, US

Anthony E. Novembre

16Patents
8h-index
14Co-inventors
65Inventor score

Filing activity: Mar 6, 1986 → Jul 23, 2002

Most-cited inventions

PatentTitleAreaCited byStatus
US5948570A Process for dry lithographic etching Electricity 78 Expired
US5366851A Device fabrication process Physics 56 Expired
US5656182A Process for fabricating a device in which the process is controlled by near-field imaging latent features introduced into energy sensitive resist materials Physics 23 Expired
US5066566A Resist materials Emerging Cross-Sectional Technologies 17 Expired
US5688634A Energy sensitive resist material and process for device fabrication using the resist material Emerging Cross-Sectional Technologies 13 Expired
US4701342A Negative resist with oxygen plasma resistance Physics 11 Expired
US6051346A Process for fabricating a lithographic mask Physics 10 Expired
US6368753B1 Mask repair Physics 9 Expired
US4935094A Negative resist with oxygen plasma resistance Physics 8 Expired
US5985493A Membrane mask for projection lithography Physics 3 Expired
US5374504A Resist materials and processes of their use Emerging Cross-Sectional Technologies 3 Expired
US6838213B2 Process for fabricating a mask Physics 2 Expired
US4892617A Processes involving lithographic materials Emerging Cross-Sectional Technologies 2 Expired
US5451480A Artical fabrication utilizing lithographic processes Physics 2 Expired
US6372393B2 Process for fabricating a projection electron lithography mask and a removable, reusable cover for use therein Physics 0 Expired
US6251543A Process for fabricating a projection electron lithography mask and a removable reusable cover for use therein Physics 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.