Method and apparatus for rinsing materials or articles
US4895604A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Nov 10, 1988 |
| Grant date | Jan 23, 1990 |
| Priority date | — |
| Expiry date | Nov 10, 2008 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23G5/04
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and an apparatus for rinsing materials or articles to remove deposits attached onto the surfaces of those materials or articles and humidity from the them by vapor of rinsing solvent which is evaporated by heating and filled in a rinsing chamber. In the method or the apparatus when it is detected that the vapor having been cooled to a temperature lower than that of the predetermined reference level, occurence or generation of failure in rinsing operation can be grasped.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.