Scattering-type particle detection device for use in high temperature process chambers
US4896048A · kind A · utility
17Cited by
7References
36Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 27, 1988 |
| Grant date | Jan 23, 1990 |
| Priority date | — |
| Expiry date | May 27, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0833
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A particle detector includes optical fiber for conducting short wavelength radiation received from a radiation source through a chamber in which a semiconductor wafer is being processed. Light that is scattered by contaminant particles in the process chamber is sensed by an optical fiber pickup, and pulse signals are generated by a photosensing means to provide an indication of the number of particles within the process chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.