Patent · US Expired

Method and apparatus for stabilizing the frequency of a laser beam

US4905243A · kind A · utility

71Cited by

8References

11Claims

0Family size

Assignee

Lambda-Physik Forschungs-und Entwicklungs GmbH · DE

Inventors

Peter Lokai · Oettingen, DE
Heribert Rosenkranz · Göttingen, DE

Key dates

Filing date	Dec 22, 1988
Grant date	Feb 27, 1990
Priority date	—
Expiry date	Dec 22, 2008

Classification

Technology area (CPC H)Electricity
CPC primaryH01S3/225
WIPO fieldOptics
WIPO sectorInstruments

Abstract

For stabilizing the frequency of a narrow-band Excimer laser beam the interference rings of a Fabry-Perot interferometer 16 are projected onto a solid-state image sensor 18 and by means of the solid-state image sensor an electrical signal is generated which is dependent on the frequency of the laser beam. The electrical signal is compared with a stored reference signal to derive an adjusting signal 32 for an optical reflection grating 38 with which the frequency of the laser beam 12 is regulated to a desired value. The absolute value of the frequency of the laser beam 12 is determined by means of the optogalvanic effect.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.