Inventor · Oettingen, DE

Peter Lokai

20Patents
10h-index
15Co-inventors
68Inventor score

Filing activity: Dec 22, 1988 → Jan 29, 2003

Most-cited inventions

PatentTitleAreaCited byStatus
US4905243A Method and apparatus for stabilizing the frequency of a laser beam Electricity 71 Expired
US5663973A Tunable narrowband source of a coherent radiation Physics 54 Expired
US5659419A Tunable narrowband optical parametrical oscillator Physics 41 Expired
US6160832A Method and apparatus for wavelength calibration Electricity 37 Expired
US6580517B2 Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp Electricity 31 Expired
US6421365B1 Narrow band excimer or molecular fluorine laser having an output coupling interferometer Electricity 15 Expired
US6272158A Method and apparatus for wavelength calibration Electricity 15 Expired
US5671241A Tunable source of narrowband coherent radiation Emerging Cross-Sectional Technologies 14 Expired
US5661595A Tunable, optical parametric oscillator Physics 13 Expired
US5796513A Laser arrangement for generating narrow-band, tunable coherent radiation Physics 12 Expired
US5896220A Production of narrow-band coherent radiation by using at least one optical parametric oscillator Physics 9 Expired
US6856638B2 Resonator arrangement for bandwidth control Electricity 9 Expired
US6839375B1 On-line quality control of the key optical components in lithography lasers using laser induced fluorescence Physics 6 Expired
US6608848B2 Method and apparatus for wavelength calibration Electricity 6 Expired
US6516012B2 Narrow band excimer or molecular fluorine laser having an output coupling interferometer Electricity 4 Expired
US6553050B1 Narrow band excimer or molecular fluorine laser having an output coupling interferometer Electricity 3 Expired
US6792023B1 Method and apparatus for reduction of spectral fluctuations Electricity 3 Expired
US6717973B2 Wavelength and bandwidth monitor for excimer or molecular fluorine laser Electricity 3 Expired
US7006541B2 Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp Electricity 2 Expired
US6567451B2 Narrow band excimer or molecular fluorine laser having an output coupling interferometer Electricity 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.