Process and apparatus for coating microcavities
US4915806A · kind A · utility
8Cited by
6References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 22, 1986 |
| Grant date | Apr 10, 1990 |
| Priority date | — |
| Expiry date | Jul 22, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/76877
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A process for coating substrates which has microcavities comprises coating the substrate surface under a vacuum with a predetermined substance to form a layer of the substance deposited on the surface and in the cavity. Directing subsequent layers onto the substrate with an ion bombardment so as to cause the molecular beams of the coating substance to strike the cavities at divergence angles of not greater than 10.degree..
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.