Ion beam scanning method and apparatus
US4922106A · kind A · utility
93Cited by
24References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 6, 1987 |
| Grant date | May 1, 1990 |
| Priority date | — |
| Expiry date | Nov 6, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/147
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An ion beam scanning method and apparatus produces a parallel scanned ion beam with a magnetic deflector having in one instance wedge-shaped pole pieces that develop a uniform magnetic field. A beam accelerator for the scanned beam has a slot-shaped passage which the scanned beam traverses. The beam scan and the beam traverse over a target object are controlled to attain selected beam current, and correspondingly ion dose, on a target object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.