Inventor · Brookline, MA, US

Robert Kaim

32Patents
11h-index
39Co-inventors
75Inventor score

Filing activity: Nov 6, 1987 → Nov 17, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US5595784A Titanium nitride and multilayers formed by chemical vapor deposition of titanium halides Electricity 99 Expired
US4922106A Ion beam scanning method and apparatus Electricity 93 Expired
US4980562A Method and apparatus for high efficiency scanning in an ion implanter Electricity 66 Expired
US5996528A Method and apparatus for flowing gases into a manifold at high potential Electricity 39 Expired
US7966879B2 Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel Emerging Cross-Sectional Technologies 22 Active
US8062965B2 Isotopically-enriched boron-containing compounds, and methods of making and using same Emerging Cross-Sectional Technologies 18 Active
US8237134B2 Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system Emerging Cross-Sectional Technologies 15 Active
US7943204B2 Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation Electricity 14 Active
US8603252B2 Cleaning of semiconductor processing systems Electricity 13 Active
US7057192B2 Radial scan arm and collimator for serial processing of semiconductor wafers with ribbon beams Electricity 12 Expired
US8796131B2 Ion implantation system and method Electricity 11 Active
US8598022B2 Isotopically-enriched boron-containing compounds, and methods of making and using same Emerging Cross-Sectional Technologies 9 Active
US7819981B2 Methods for cleaning ion implanter components Electricity 8 Active
US8779383B2 Enriched silicon precursor compositions and apparatus and processes for utilizing same Electricity 8 Active
US8399865B2 Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system Emerging Cross-Sectional Technologies 8 Active
US8389068B2 Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation Electricity 7 Active
US8555705B2 Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel Emerging Cross-Sectional Technologies 6 Active
US8785889B2 Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system Emerging Cross-Sectional Technologies 4 Active
US9111860B2 Ion implantation system and method Electricity 3 Active
US8138071B2 Isotopically-enriched boron-containing compounds, and methods of making and using same Electricity 2 Active
US9012874B2 Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system Emerging Cross-Sectional Technologies 2 Active
US9170246B2 Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel Emerging Cross-Sectional Technologies 2 Active
US9754786B2 Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system Emerging Cross-Sectional Technologies 2 Active
US9142387B2 Isotopically-enriched boron-containing compounds, and methods of making and using same Emerging Cross-Sectional Technologies 2 Active
US9171725B2 Enriched silicon precursor compositions and apparatus and processes for utilizing same Electricity 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.