Apparatus for heat treating substrates capable of quick cooling
US4925388A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 22, 1989 |
| Grant date | May 15, 1990 |
| Priority date | — |
| Expiry date | Sep 22, 2009 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF27B5/16
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for heat treating and quickly cooling substrates. The apparatus includes a cylindrical furnace core tube for containing substrates, a heater enclosing the furnace core tube, and outer cylinder enclosing and containing the furnace core tube and the heater, a blower for drafting cooling air to the space between the furnace core tube and the outer cylinder along the longitudinal direction of the furnace core tube, and a switching valve connected between the blower and both ends of the outer cylinder for switching the direction in which the cooling air travels. Since the direction of the cooling air is changed, the entire furnace core tube is uniformly cooled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.