Method and apparatus for coating workpieces
US4929321A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 17, 1989 |
| Grant date | May 29, 1990 |
| Priority date | — |
| Expiry date | Mar 17, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/022
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method and arrangement for the vacuum coating of workpieces by arc evaporation, comprises at least one evaporating cathode with a surface to be evaporated, an axis of the cathode intersecting the cathode surface. Workpieces to be coated are arranged around the axis at locations which are spaced radially outwardly and at an axial distance from the cathode surface. In order to prevent direct line of sight communication between the cathode surface and the workpieces, a visual shield is positioned between the cathode surface and the workpieces, which at least partly surrounds the axis. In this way, the ions which are evaporated from the cathode surface are deflected outwardly around the visual shield and toward the workpieces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.