Apparatus for coating a substrate with dielectrics

US4931169A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Michael Scherer · Crimmitschau, DE
• Rudolf Latz · Rodgau, DE
• Ulrich Patz · Gelnhausen, DE

Key dates

• Filing date: Sep 28, 1988
• Grant date: Jun 5, 1990
• Expiry date: Sep 28, 2008

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/35
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

The invention relates to an apparatus for coating a substrate (1) with dielectrics which has a dc current source (10) connected to an electrode (5) which is connected to a target (3) which is being sputtered. The sputtered particles of the target (3) form a compound with an introduced substance which is deposited on the substrate (1). Permeating the target (3) are toroidal maganetic fields whose field lines emerge in the region of magnetic poles from the surface of the target (3). Under the invention an ac voltage source (30) is provided whose output voltage is superimposed on the dc voltage of the dc current source (10). Here, the electrical output of the ac current source (30) which is supplied to the electrode (5) corresponds to 5% to 25% of the output supplied by the dc current source (10) to the electrode (5).