Iodine sterilization of deionized water in semiconductor processing
US4935064A · kind A · utility
4Cited by
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16Claims
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Assignee
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Key dates
| Filing date | Mar 28, 1988 |
| Grant date | Jun 19, 1990 |
| Priority date | — |
| Expiry date | Mar 28, 2008 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC02F2103/04
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
Trace quantities of elemental iodine are added to deionized water used in the manufacture of semiconductor materials and devices in order to sterilize the water and the delivery system of microscopic life forms, and to leave the iodine in the flow all the way through processing except for those process steps where iodine may be detrimental to the process step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.