Turbo-molecular pump
US4946345A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Mar 16, 1989 |
| Grant date | Aug 7, 1990 |
| Priority date | — |
| Expiry date | Mar 16, 2009 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16F15/10
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The present invention provides a turbo-molecular pump in which an exhaust action is achieved by virtue of the combination of stationary blades and rotor blades adapted to rotate at high speed and to cooperate with each other to impart momentum to gaseous molecules rushing in against the blades under an extremely low-pressurized condition. Disposed inside the casing are a fixed shaft and the rotor, the latter being movably supported by a pair of active radial magnetic bearings. A motor is interposed between said pair of magnetic bearings. A dynamic damper is provided at one end of the fixed shaft to inhibit the occurrence of vibrations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.