Patent · US Expired

Apparatus for vaporizing monomers that flow at room temperature

US4947789A · kind A · utility

16Cited by

6References

9Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Ingo Hussla · Hanau, DE
Jochen Ritter · Laubach, DE

Key dates

Filing date	Nov 4, 1988
Grant date	Aug 14, 1990
Priority date	—
Expiry date	Nov 4, 2008

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C16/4485
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

An evaporator chamber has an entry end with a conduit connected to the output of a mass flow regulator, an exit end connected to a vacuum, and a wall surface extending therebetween. A body having capillary action is disposed in the chamber and has one end connected to the conduit and a free surface spaced from the wall surface in line of sight thereof. Heating means for the wall surface heats the body radiantly and causes monomer carried thereby to evaporate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.