Method of monitoring semiconductor manufacturing processes and test sample therefor
US4963500A · kind A · utility
14Cited by
6References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 2, 1988 |
| Grant date | Oct 16, 1990 |
| Priority date | — |
| Expiry date | Feb 2, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S148/162
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Method of determining contaminants in a semiconductor processing apparatus in which a high purity, high carrier lifetime semiconductor test wafer is processed and the degradation of its carrier lifetime is determined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.