Gary E. Miner
15Patents
12h-index
31Co-inventors
78Inventor score
Filing activity: Feb 2, 1988 → Oct 9, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5660472A | Method and apparatus for measuring substrate temperatures | Emerging Cross-Sectional Technologies | 117 | Expired |
| US6037273A | Method and apparatus for insitu vapor generation | Electricity | 83 | Expired |
| US5755511A | Method and apparatus for measuring substrate temperatures | Electricity | 66 | Expired |
| US6114258A | Method of oxidizing a substrate in the presence of nitride and oxynitride films | Electricity | 60 | Expired |
| US6450116B1 | Apparatus for exposing a substrate to plasma radicals | Electricity | 59 | Expired |
| US6179466A | Method and apparatus for measuring substrate temperatures | Electricity | 49 | Expired |
| US5848842A | Method of calibrating a temperature measurement system | Emerging Cross-Sectional Technologies | 46 | Expired |
| US6159866A | Method for insitu vapor generation for forming an oxide on a substrate | Electricity | 21 | Expired |
| US7317229B2 | Gate electrode structures and methods of manufacture | Electricity | 18 | Expired |
| US7078302B2 | Gate electrode dopant activation method for semiconductor manufacturing including a laser anneal | Electricity | 17 | Expired |
| US6410456B1 | Method and apparatus for insitu vapor generation | Electricity | 14 | Expired |
| US4963500A | Method of monitoring semiconductor manufacturing processes and test sample therefor | Emerging Cross-Sectional Technologies | 14 | Expired |
| US7541650B2 | Gate electrode structures | Electricity | 5 | Active |
| US7611976B2 | Gate electrode dopant activation method for semiconductor manufacturing | Electricity | 3 | Active |
| US7658973B2 | Tailoring nitrogen profile in silicon oxynitride using rapid thermal annealing with ammonia under ultra-low pressure | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.