SRAM with local interconnect
US4975756A · kind A · utility
173Cited by
16References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 28, 1989 |
| Grant date | Dec 4, 1990 |
| Priority date | — |
| Expiry date | Feb 28, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/038
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An SRAM using TiN local interconnects. This permits the moat parasitic capacitance to be reduced, and also avoids use of metal jumpers, resulting in increased density.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.