Removal of particles from solid-state surfaces by laser bombardment

US4980536A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Karl Asch · Springe, DE
• Joachim Keyser · Wildberg, DE
• Klaus Meissner · Herrenberg, DE
• Werner Zapka · Gärtringen, DE

Key dates

• Filing date: Jan 8, 1990
• Grant date: Dec 25, 1990
• Expiry date: Jan 8, 2010

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F1/20
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

To remove small particles from surfaces of solid bodies at least one laser pulse of high power density (excimer laser) is directed onto the surface. The method is particularly suited to clean Si-masks used in electron-beam lithographic devices. An arrangement for in-situ-cleaning of masks in accordance to this method is integrated in such an electron-beam lithographic device.