Semiconductor element
US4982251A · kind A · utility
3Cited by
11References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 17, 1990 |
| Grant date | Jan 1, 1991 |
| Priority date | — |
| Expiry date | Apr 17, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/6745
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor element comprises its main part constituted of a polycrystalline silicon semiconductor layer containing 0.01 to 1 atomic % of fluorine atoms.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.