Positive dye photoresist compositions with 2,4-bis(phenylazo)resorcinol
US4983492A · kind A · utility
14Cited by
6References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 6, 1988 |
| Grant date | Jan 8, 1991 |
| Priority date | — |
| Expiry date | Jun 6, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/091
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
This invention provides improved positive photoresist compositions containing a bis(azophenyl)resorcinol as a dye.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.