Scanning electron microscope
US4983832A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 18, 1989 |
| Grant date | Jan 8, 1991 |
| Priority date | — |
| Expiry date | Jul 18, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04N13/296
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
In a scanning electron microscope scanning a specimen by an electron beam, the electron beam is two-dimensionally deflected so that a deflection fulcrum for the electron beam is located on the principal plane of an objective lens. Further, in order that the electron beam is incident on the specimen at a predetermined angle of incidence, the electron beam is deflected in a relation in which the object point of the objective lens provides another deflection fulcrum. The angle of incidence of the electron beam incident on the specimen is changed over between +.theta. and -.theta., thereby providing a pair of stereoscopic scanned images of the specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.