Mitsugu Sato
129Patents
17h-index
140Co-inventors
89Inventor score
Filing activity: Jul 18, 1989 → Aug 2, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6538249B1 | Image-formation apparatus using charged particle beams under various focus conditions | Electricity | 64 | Expired |
| US7582885B2 | Charged particle beam apparatus | Electricity | 55 | Active |
| US6875984B2 | Bio electron microscope and observation method of specimen | Electricity | 51 | Expired |
| US5608218A | Scanning electron microscope | Electricity | 43 | Expired |
| US5903004A | Energy dispersive X-ray analyzer | Electricity | 33 | Expired |
| US6838667B2 | Method and apparatus for charged particle beam microscopy | Electricity | 30 | Expired |
| US6791084B2 | Method and scanning electron microscope for measuring dimension of material on sample | Electricity | 29 | Expired |
| US5894124A | Scanning electron microscope and its analogous device | Electricity | 28 | Expired |
| US6348690B1 | Method and an apparatus of an inspection system using an electron beam | Electricity | 25 | Expired |
| US6043491A | Scanning electron microscope | Electricity | 23 | Expired |
| US7449690B2 | Inspection method and inspection apparatus using charged particle beam | Electricity | 20 | Active |
| US5387793A | Scanning electron microscope | Electricity | 20 | Expired |
| US6864493B2 | Charged particle beam alignment method and charged particle beam apparatus | Electricity | 18 | Expired |
| US5670782A | Scanning electron microscope and speciman observation method thereby | Electricity | 17 | Expired |
| US6501077B1 | Scanning electron microscope | Electricity | 17 | Expired |
| US7339167B2 | Charged particle beam apparatus | Electricity | 17 | Active |
| US7381968B2 | Charged particle beam apparatus and specimen holder | Electricity | 17 | Expired |
| US6555816B1 | Scanning electron microscope and sample observation method using the same | Electricity | 17 | Expired |
| US4983832A | Scanning electron microscope | Electricity | 16 | Expired |
| US6166380A | Resolving power evaluation method and specimen for electron microscope | Electricity | 16 | Expired |
| US6787772B2 | Scanning electron microscope | Electricity | 16 | Expired |
| US6885001B2 | Scanning electron microscope | Electricity | 12 | Expired |
| US7034296B2 | Method of forming a sample image and charged particle beam apparatus | Electricity | 12 | Expired |
| US6627889B2 | Apparatus and method for observing sample using electron beam | Electricity | 12 | Expired |
| US7105816B2 | Electron beam device | Electricity | 12 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.