Particle beam measuring method for non-contact testing of interconnect networks

US4985681A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Matthias Brunner · Tauberbischofsheim, DE
• Juergen Frosien · Ottobrunn, DE
• Reinhold Schmitt · Munich, DE
• Burkhard Lischke · Munich, DE

Key dates

• Filing date: Dec 27, 1985
• Grant date: Jan 15, 1991
• Expiry date: Dec 27, 2005

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/50
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

For testing an interconnect network for shorts and interruptions, a point of the network to be tested is charged with a particle beam. Subsequently, a potential at least one further contact point is read with the same particle beam and an unaltered primary energy. An identification of potential occurs by documenting the secondary electrons triggered at the contact points. In order to avoid a disturbing change of potential during the measuring phase, the measuring time is only a fraction of the time for charging the network.