Diarylnitrones
US4990665A · kind A · utility
15Cited by
3References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 17, 1989 |
| Grant date | Feb 5, 1991 |
| Priority date | — |
| Expiry date | Jul 17, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/091
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Diaryinitrones are provided which are useful for near UV photolithography.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.