MicroSi, Inc.
9Patents
0Active
9Granted
28Portfolio score
Filing activity: Feb 6, 1987 → Feb 14, 1994
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5310619A | Resist compositions comprising a phenolic resin, an acid forming onium salt and a tert-butyl ester or tert-butyl carbonate which is acid-cleavable | Emerging Cross-Sectional Technologies | 99 | Expired |
| US5108874A | Composite useful in photolithography | Chemistry; Metallurgy | 74 | Expired |
| US5106723A | Contrast enhancement layer compositions, alkylnitrones, and use | Emerging Cross-Sectional Technologies | 67 | Expired |
| US5002993A | Contrast enhancement layer compositions, alkylnitrones, and use | Physics | 65 | Expired |
| US5196295A | Spin castable mixtures useful for making deep-UV contrast enhancement layers | Emerging Cross-Sectional Technologies | 64 | Expired |
| US4931380A | Pre-exposure method for increased sensitivity in high contrast resist development of positive working diazo ketone photoresist | Physics | 22 | Expired |
| US5362607A | Method for making a patterned resist substrate composite | Physics | 19 | Expired |
| US4990665A | Diarylnitrones | Physics | 15 | Expired |
| US4968757A | Soluble silicone-imide copolymers | Emerging Cross-Sectional Technologies | 7 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.