Patent · US Expired

High current thin film transistor

US4990977A · kind A · utility

4Cited by
3References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 29, 1988
Grant dateFeb 5, 1991
Priority date
Expiry dateMar 29, 2008

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D30/6704

Abstract

A thin film transistor including a substrate upon which are supported a gate electrode layer, a gate dielectric layer, at least one finger-like source electrode, a semiconductor layer overlying the gate dielectric layer and at least partially surrounding the source electrode, and a drain electrode layer contiguous with the semiconductor layer. The length of the current path between the source electrode and the drain electrode layer is defined by a first path portion located at the semiconductor/gate dielectric interface and extending, between adjacent source elements, substantially parallel to the interface, and a second path portion whose length is substantially coextensive with the thickness of the semiconductor layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.