Fine positioning device and displacement controller therefor
US4991309A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 14, 1988 |
| Grant date | Feb 12, 1991 |
| Priority date | — |
| Expiry date | Sep 14, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/41352
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A fine positioning device is formed of a rigid support member; a first set of radial flexible-beam displacement mechanisms provided symmetrically to each other on the support member to produce angular displacements about a first axis; a second set of radial flexible-beam displacement mechanisms provided symmetrically to each other on the support member to produce angular displacements about a second axis which is perpendicular to the first axis; a third set of radial flexible-beam displacement mechanisms connected to either one of the sets of radial flexible-beam displacement mechanisms to produce angular diaplacements about a third axis which is perpendicular to both the first and second axes; and a fine motion table fixed on the radial flexible-beam displacement mechanisms which are other than those connected to the radial flexible-beam displacement mechanisms for producing angular displacements about the third axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.