Method and apparatus for neutralizing an accumulated charge on a specimen by means of a conductive lattice deposited on the specimen
US4992661A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Aug 17, 1988 |
| Grant date | Feb 12, 1991 |
| Priority date | — |
| Expiry date | Aug 17, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05F3/02
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of neutralizing an accumulated charge on a surface of a specimen which is examined in a scanning electron microscope (SEM) or a scanning ion microprobe mass analyzer (IMA), utilizes an electrically conductive thin film deposited on a part of the specimen surface. The charge is due to irradiation by a primary charged particle beam from the SEM or IMA. The thin film is made conductivity with a specimen mount mounting the specimen, and the irradiating range of the primary beam covers at least a part of the thin film. Thus, the accumulated charge can be neutralized, thereby a resolution of the SEM being improved due to applying higher accelerating voltage for the primary beam, and measured data of higher reliability being obtained in the IMA.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.