Gas pressure gauge and pressure measuring method
US4995264A · kind A · utility
24Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 14, 1989 |
| Grant date | Feb 26, 1991 |
| Priority date | — |
| Expiry date | Dec 14, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L21/22
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A process for measuring pressure, preferably vacuum is described. The measuring signals from a heat conduction gauge and the measuring signals from a gas friction gauge are processed to a common measuring signal preferably by multiplication. They are linearly superimposed or added. The heat conduction gauge is preferably a Pirani gauge and the gas friction gauge is preferably a tuning fork quartz gauge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.