Contrast enhancement layer compositions, alkylnitrones, and use
US5002993A · kind A · utility
65Cited by
6References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 4, 1989 |
| Grant date | Mar 26, 1991 |
| Priority date | — |
| Expiry date | Dec 4, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/091
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Contrast enhancement compositions are provided which can be used to make contrast enhancement layer photoresist composites. The composites can be used to make patterned photoresists under mid-UV light and utilize photobleachable alkylnitrones.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.